Numéro
J. Phys. I France
Volume 4, Numéro 8, August 1994
Page(s) 1181 - 1197
DOI https://doi.org/10.1051/jp1:1994248
DOI: 10.1051/jp1:1994248
J. Phys. I France 4 (1994) 1181-1197

Nanostructural and nanochemical investigation of luminescent photoelectrochemically etched porous n-type silicon

A. Albu-Yaron1, S. Bastide1, D. Bouchet2, N. Brun2, C. Colliex2 and C. Lévy-Clément1

1  Laboratoire de Physique des Solides de Bellevue, 1 place Aristide Briand, 92195 Meudon, France
2  Laboratoire de Physique des Solides, Bât. 510, Université Paris-Sud, 91405 Orsay, France


(Received 2 February 1994, accepted in final form 2 May 1994)

Abstract
Porous silicon obtained on n-type silicon by photoelectrochemical etching in HF, is formed of a macroporous silicon layer beneath a nanoporous silicon layer. Microstructural investigations and chemical analysis at the atomic level of the nanoporous silicon film (obtained from a highly doped (111) oriented Si substrate) have been done by high resolution transmission electron microscopy (HRTEM) and electron energy loss spectroscopy (EELS) using a scanning transmission electron microscope (STEM). We have found chat the nanoporous Si consists of a regular Si macroarray with triangular geometry. Nanometer-size tangled wires are contained within and attached to the macroarray. HRTEM images clearly demonstrate the existence of quantum-sized Si wires made of a crystalline core covered with an amorphous layer. Electron energy loss spectra (EELS) have been recorded for different positions of the incident probe across the quantum-sized Si wires. The results obtained in the low-loss region and at the Si L 23 edge have been compared with those recorded on reference specimens (Si/SiO 2 interface and hydrogenated Si sample). Although they do not exclude the presence of one or a few monolayers of foreign species, of hydrogen in particular, on the outer surface, our results generally support the quantumconfinement model to interpret the observed photoluminescence in nanoporous Si.



© Les Editions de Physique 1994

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.